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Vacuum pump(5v) - List of Manufacturers, Suppliers, Companies and Products

Vacuum pump Product List

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G-TRAN Series Pirani Gauge

G-TRAN Series Pirani Gauge

Pirani vacuum gauge capable of measuring from 3000 Pa to 0.4 Pa [ULVAC].

The sensor unit SP1 is a Pirani vacuum gauge that can measure from 3000 Pa to 0.4 Pa, featuring an integrated measuring element WP series and circuit section. This vacuum gauge eliminates the operation and display section from conventional controllers, focusing on the minimum necessary functions, which enables "cost reduction" and "space saving." 【Specifications】 ○ LED display: Power, Error, Set Point 1/2 ○ Power supply voltage: DC 24V ± 2V, 90mA (Max.) ○ Input/output connector: D-sub-15P (M2.6 screw) ○ Body weight: 190g (excluding measuring element) ○ Accessories: 1 set of input/output connectors, 1 instruction manual For more details, please contact us or download the catalog.

  • Other measurement, recording and measuring instruments

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Optical Process Monitor Optius

Optical Process Monitor Optius

You can monitor the status of various plasma processes in real time. 【ULVAC】

The optical process monitor Optius can monitor the status of various plasma processes in real-time by measuring the emission spectrum of the plasma. It is ideal for MFC control in reactive sputtering and endpoint detection in etching. 【Specifications】 ○ Weight: Main unit (TSC): 4.9kg Expansion unit (ESC, 1ch): 1.3kg ○ Power supply: AC100–240V (50/60Hz) ○ Power consumption: 100W (when using 5 channels) ○ Operating environment: Temperature: 10 – 40°C, Humidity: 15 – 80% RH (without condensation) For more details, please contact us or download the catalog.

  • Other measurement, recording and measuring instruments
  • Other process controls

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Abnormal Discharge Prevention Unit A2K Series

Abnormal Discharge Prevention Unit A2K Series

High throughput! Large capacity is possible with master-slave connections. [ULVAC]

The A2K series is an abnormal discharge prevention unit that applies a positive voltage pulse to a DC power supply in a reactive sputtering process to neutralize the charge on the target. By reducing abnormal discharges, it enables high power input. The A2K-20K and 40K can be operated in parallel with up to six units each. It is possible to synchronize the output pulses of multiple A2K units. It can be easily installed on existing equipment, achieving improved yield and throughput at a low cost. 【Features】 ○ High throughput ○ Reduced substrate damage ○ Suppressed substrate temperature ○ Simple connectivity ○ Adjustable reverse pulse frequency For more details, please contact us or download the catalog.

  • Power Supplies

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Vacuum Gauge G-TRAN Series Multi-Ion Gauge ST2-1/2-2

Vacuum Gauge G-TRAN Series Multi-Ion Gauge ST2-1/2-2

Improved measurement accuracy! Equipped with an LED that allows for easy confirmation of the vacuum gauge's status at a glance. [ULVAC]

The G-TRAN series vacuum gauge multi-ion gauge ST2-1/ST2-2 achieves long life by maximizing the advantages of the triode type, even in harsh environments for vacuum gauges. ULVAC has developed and commercialized an ion vacuum gauge that can measure accurately for a longer time, even in severe conditions. The triode type metal ion vacuum gauge significantly reduces running costs and can also contribute to improving the yield of various processes. 【Features】 ○ Triode type metal ion vacuum gauge (patent pending) ○ Small, metal measuring element ○ Wideband measurement ○ Measuring elements with different measurement ranges can be connected ○ Accurate atmospheric pressure measurement For more details, please contact us or download the catalog.

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Dry Pump Energy-Saving Attachment ECO-SHOCK ES4A

Dry Pump Energy-Saving Attachment ECO-SHOCK ES4A

No decrease in exhaust speed! Significant reduction in power consumption of dry pumps is possible. [ULVAC]

ECO-SHOCK is an attachment that significantly reduces power consumption by being installed on dry pumps. The ES4A is ideal for applications that require frequent evacuation of the loading and unloading chamber, as well as for reducing the power consumption of dry pumps with long operating times at the target pressure, such as turbo molecular pump packs. It also helps to suppress heat generation in dry pumps, thereby reducing the power consumption of air conditioning equipment. 【Features】 - Contributes to energy saving in dry pumps - Effective with volumetric transfer type dry pumps - No decrease in pumping speed across all pressure ranges - Easy to install - Reduces heat generation and power consumption of air conditioning equipment For more details, please contact us or download the catalog.

  • Other pumps

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Crystal Oscillator Film Deposition Controller CRTM-6000G

Crystal Oscillator Film Deposition Controller CRTM-6000G

From single-layer films to multi-layer films, it can be used for a wide range of deposition control. 【ULVAC】

The CRTM-6000G is a quartz oscillator-based film deposition controller that excels in cost performance while enhancing the fundamental capabilities required of a film deposition controller. Despite its compact half-rack size, it is capable of low-rate control and continuous deposition control for multilayer films up to 99 layers. 【Specifications】 ○ Dimensions: W×D×H 240mm×350mm×99mm ○ Weight: Approximately 3.6kg ○ Utility: AC85 ～ 230V 50/60Hz ○ Power Consumption: 30W Max ○ Operating Environment: Temperature: 5 ～ 40℃, Humidity: 5 ～ 95% RH (without condensation) For more details, please contact us or download the catalog.

  • Other measurement, recording and measuring instruments
  • Coating thickness gauge

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Crystal Oscillator Film Deposition Controller CRTM-9100G

Crystal Oscillator Film Deposition Controller CRTM-9100G

Quartz oscillator film deposition controller with low-rate deposition control and high-precision film thickness control [ULVAC].

The CRTM-9100G is a quartz crystal oscillator-based film deposition controller developed with the concept of balancing low cost and high functionality. It incorporates all the technologies that Ulvac has cultivated over many years as a manufacturer of quartz crystal oscillator-based film deposition controllers, including continuous deposition of multilayer films, simultaneous deposition control of up to four components, and low rate control. It can be utilized for a long time in various deposition processes. 【Specifications】 ○Dimensions: W×D×H 480mm×350mm×149mm ○Weight: Approximately 8kg ○Utility: AC 85 – 230V 50/60Hz ○Power Consumption: 60W Max ○Operating Environment: Temperature: 5 – 40℃, Humidity: 5 – 95% RH (without condensation) For more details, please contact us or download the catalog.

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  • Coating thickness gauge

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G-TRAN Series Multi-Ion Gauge SH2-1/SH2-2

G-TRAN Series Multi-Ion Gauge SH2-1/SH2-2

While enabling wideband measurements, we have significantly reduced running costs. 【ULVAC】

ULVAC has developed and commercialized the transducer-type "G-TRAN Series Multi-Ion Gauge" (patent pending), which allows for the connection of measuring elements with different measurement ranges. In conventional multi-principle vacuum gauges, we often hear customer feedback such as "a failure of one measuring element requires the complete replacement of all measuring elements," "the measuring elements are complex and prone to failure," and "the measuring elements are expensive." With this new approach, we can enable wide-range measurements while significantly reducing running costs and addressing low environmental impact. 【Product Lineup】 ○SH2-1 Standard Specification ○SH2-2 Serial Communication Specification For more details, please contact us or download the catalog.

  • Pressure

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